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SAB63 Series
Thermocompression Anodic Bonding Equipment

Wafers are bonded by thermo-compression. Precise pressure and temperature control enables high-quality bonding via metal, eutectic or adhesive interlayer. Integrated anodic bonding allows permanent glass-Si joining. Rapid thermal cycling improves throughput. Applications include metal bonding and glass capping in MEMS , optoelectronics.

Technological Advantages
Application Fields
  • Bonding of Si wafers and glass cap wafers in MEMS.
  • Hermetic bonding via metal layers in MEMS.
  • Bonding of GaN epitaxial wafers and Si wafers in Micro-LED.
  • Thermocompression bonding using adhesive layers.
Product Series
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Address: No. 22, Binhai Innovation and Entrepreneurship Park, No. 4668 Xinbei Road, Binhai New Area, Tianjin

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