Si on SiC复合衬底
- Items
- Specification
- Diameter
- 150±0.2 mm
- Sl Orientation
- <100>, <110>, <111>, etc.
- Si Type
- P/N
- Transfer Si layer Thickness
- ≥0.1 μm
- Front Roughness
- Ra≤0.2 nm (5 μm * 5 μm)
- SiC Polytope
- 4H
- SiC Resistivity
- 0.015~0.025/≥1E8 ohm·cm
- Edge Chip, Scratch, Crack (visual inspection)
- None
- TTV
- ≤5 μm
- Thickness
- 350/500±25 μm
