设备特点
规格参数
-
ItemsSpecification
-
Wafer size6, 8, 12 inch
-
Wafer loadCassette, SMIF, Foup Optional
-
Bonding accuracy±0.5 μm; ±0.2 μm; ±0.1 μm
-
Bonding strength≥2.0 J/㎡ (after annealing)
-
CapacityInfrared alignment: ≥ 50 pairs/h (dual module)
FTF visible light: ≥ 12 pairs/h (single module) -
Multi-module integratedPre-align, plasma activation, clean, align bond, accuracy inspection, debonding
-
Chemical cleanOptional
-
Internal cleanlinessFFU control, ISO Class 1
















